Novel MEMS Auditory Capacitive Structure with Octagonal Diaphragm

<p id="p1">BioMEMS devices, or biomedical microelectromechanical systems, represent a transformative integration of microscale engineering and life sciences. By operating at scales comparable to biological structures, these devices enable precise and localized interactions with cells, tissues, and o...

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Bibliographic Details
Main Author: Taherian, Sina
Format: Book Chapter
Language:English
Published: IntechOpen 2025
Subjects:
Online Access:https://www.intechopen.com/chapters/1204690
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