Micro-Electro-Mechanical Systems Applications in Optical Devices

<p id="p1">This chapter delves into the revolutionary impact of Micro-Electro-Mechanical Systems (MEMS) on optical devices, driven by advancements in materials science and micro/nano manufacturing techniques. MEMS devices offer unparalleled precision, miniaturization, and low power consumption. Thei...

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Detalles Bibliográficos

Autores principales:	Zhai, Hao, Yao, Selina X., Liu, Zhuang
Formato:	Capítulo de libro
Lenguaje:	inglés
Publicado:	IntechOpen 2024
Materias:	Physical Sciences, Engineering and Technology
Acceso en línea:	https://www.intechopen.com/chapters/1206473
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