Electrical Properties of Binary Thin Films

<p>Binary compounds have been extensively studied in recent years due to their numerous advantageous characteristics, making them attractive to both industrial and academic research. Among these, doped hafnium oxide (HfO<sub>2</sub>) and aluminum nitride (AlN) thin films are particularly promising b...

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Bibliographic Details
Main Authors: Hrib, Luminița Mirela, Balescu, Liliana-Marinela, Chirila, Cristina Florentina, Boni, Andra-Georgia, Popescu, Dana Georgeta, Istrate, Marian Cosmin, Patru, Roxana Elena, Leonat, Lucia Nicoleta, Pintilie, Lucian
Format: Book Chapter
Language:English
Published: IntechOpen 2026
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Online Access:https://www.intechopen.com/chapters/1244494
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