Electrical Properties of Binary Thin Films
<p>Binary compounds have been extensively studied in recent years due to their numerous advantageous characteristics, making them attractive to both industrial and academic research. Among these, doped hafnium oxide (HfO<sub>2</sub>) and aluminum nitride (AlN) thin films are particularly promising b...
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| Main Authors: | , , , , , , , , |
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| Format: | Book Chapter |
| Language: | English |
| Published: |
IntechOpen
2026
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| Subjects: | |
| Online Access: | https://www.intechopen.com/chapters/1244494 |
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