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Cita APA (7a ed.)
Gerfers, F., Kohlstadt, P. M., Ginsburg, E., He, M. Y., Samara-Rubio, D., Manoli, Y., & Li-PengWang. (2010). Sputtered AlN Thin Films for Piezoelectric MEMS Devices - FBAR Resonators and Accelerometers. IntechOpen. https://doi.org/10.5772/6887
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Cita Chicago Style (17a ed.)
Gerfers, Friedel, Peter M. Kohlstadt, Eyal Ginsburg, Ming Yuan He, Dean Samara-Rubio, Yiannos Manoli, y Li-PengWang. Sputtered AlN Thin Films for Piezoelectric MEMS Devices - FBAR Resonators and Accelerometers. IntechOpen, 2010. https://doi.org/10.5772/6887.
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Cita MLA (9a ed.)
Gerfers, Friedel, et al. Sputtered AlN Thin Films for Piezoelectric MEMS Devices - FBAR Resonators and Accelerometers. IntechOpen, 2010. https://doi.org/10.5772/6887.
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