OCT with a Visible Broadband Light Source Applied to High-Resolution Nondestructive Inspection for Semiconductor Optical Devices

Optical coherence tomography with a visible broadband light source (vis-OCT) was developed for high-resolution and nondestructive measurements of semiconductor optical devices. Although a near-infrared (NIR) light source should be used for medical OCT to obtain deep penetration of biological samples...

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Detalles Bibliográficos

Autores principales:	Ozaki, Nobuhiko, Ishida, Kazumasa, Nishi, Tsuyoshi, Ohsato, Hirotaka, Watanabe, Eiichiro, Ikeda, Naoki, Sugimoto, Yoshimasa
Formato:	Capítulo de libro
Lenguaje:	inglés
Publicado:	IntechOpen 2020
Materias:	Physical Sciences, Engineering and Technology
Acceso en línea:	https://www.intechopen.com/chapters/70108
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