Variation of Sensitivity of a MEMS Capacitive Accelerometer Based Microphone with Suspension System Topology

The present research seeks to improve a highly sensitive MEMS capacitive accelerometer as a probable completely implantable hearing aid microphone. The research analyses the effect of different suspension system topologies on accelerometer efficiency. The topology of folded beam suspension is consid...

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Detalles Bibliográficos

Autores principales:	Dwivedi, Apoorva, Asthana, Prateek, Khanna, Gargi, Chaudhary, Tarun
Formato:	Capítulo de libro
Lenguaje:	inglés
Publicado:	IntechOpen 2021
Materias:	Health Sciences
Acceso en línea:	https://www.intechopen.com/chapters/76173
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