Recording of Micro/Nanosized Elements on Thin Films of Glassy Chalcogenide Semiconductors by Optical Radiation
Inorganic resists based on chalcogenide glassy semiconductor (CGS) films can be effectively used in the creation of micro- and nanoelements of optoelectronic devices, micro- and nanoelectromechanical systems, and diffractive optical elements. The use of these materials is based mainly on their sensi...
Guardado en:
| Autores principales: | , , , |
|---|---|
| Formato: | Capítulo de libro |
| Lenguaje: | inglés |
| Publicado: |
IntechOpen
2022
|
| Materias: | |
| Acceso en línea: | https://www.intechopen.com/chapters/80727 |
| Etiquetas: |
Sin Etiquetas, Sea el primero en etiquetar este registro!
|