Manufacturing Methods Based on Planar Circuits

Manufacture of hybrid 3D-planar circuits, especially those incorporating empty waveguides on substrates, can benefit from most standardized planar fabrication processes, although they are not exactly the same. For this reason, planar circuit manufacturing methods must be adapted to the requirements...

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Bibliographic Details

Main Authors:	Herraiz, Darío, Martínez, Leticia, Ballesteros, José A., Fernandez, Marcos D., Esteban, Héctor, Belenguer, Ángel
Format:	Book Chapter
Language:	English
Published:	IntechOpen 2022
Subjects:	Physical Sciences, Engineering and Technology
Online Access:	https://www.intechopen.com/chapters/85353
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