Reliability of Microelectromechanical Systems Devices

Microelectromechanical systems (MEMS) reliability issues, apart from traditional failure mechanisms like fatigue, wear, creep, and contamination, often involve many other specific mechanisms which do not damage the system’s function but may degrade the performance of MEMS devices. This chapter focus...

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Autores principales:	Zhou, Wu, He, Jiangbo, Peng, Peng, Chen, Lili, Cao, Kaicong
Formato:	Capítulo de libro
Lenguaje:	inglés
Publicado:	IntechOpen 2020
Materias:	Physical Sciences, Engineering and Technology
Acceso en línea:	https://www.intechopen.com/chapters/67483
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