Reliability of Microelectromechanical Systems Devices
Microelectromechanical systems (MEMS) reliability issues, apart from traditional failure mechanisms like fatigue, wear, creep, and contamination, often involve many other specific mechanisms which do not damage the system’s function but may degrade the performance of MEMS devices. This chapter focus...
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| Autores principales: | , , , , |
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| Formato: | Capítulo de libro |
| Lenguaje: | inglés |
| Publicado: |
IntechOpen
2020
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| Materias: | |
| Acceso en línea: | https://www.intechopen.com/chapters/67483 |
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