Methods of Fabricating Thin Films for Energy Materials and Devices
With the continued miniaturization of the electronic devices applicable in our daily lives, thin films of various functional materials used in such devices are increasingly preferred over the traditional bulk components. Various gas-phase methods have been found to be capable of depositing thin film...
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| Autores principales: | , , |
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| Formato: | Capítulo de libro |
| Lenguaje: | inglés |
| Publicado: |
IntechOpen
2020
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| Materias: | |
| Acceso en línea: | https://www.intechopen.com/chapters/70339 |
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