Methods of Fabricating Thin Films for Energy Materials and Devices

With the continued miniaturization of the electronic devices applicable in our daily lives, thin films of various functional materials used in such devices are increasingly preferred over the traditional bulk components. Various gas-phase methods have been found to be capable of depositing thin film...

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Detalles Bibliográficos

Autores principales:	Hishimone, Philipus N., Nagai, Hiroki, Sato, Mitsunobu
Formato:	Capítulo de libro
Lenguaje:	inglés
Publicado:	IntechOpen 2020
Materias:	Physical Sciences, Engineering and Technology
Acceso en línea:	https://www.intechopen.com/chapters/70339
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