Optimization of MEMS Actuator Driven by Shape Memory Alloy Thin Film Phase Change

At the microscale, shape memory alloy (SMA) microelectromechanical system (MEMS) bimorph actuators offer great potential based on their inherently high work density. An optimization problem relating to the deflection and curvature based on shape memory MEMS bimorph was identified, formulated, and so...

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Detalles Bibliográficos

Autor principal:	Knick, Cory R.
Formato:	Capítulo de libro
Lenguaje:	inglés
Publicado:	IntechOpen 2020
Materias:	Physical Sciences, Engineering and Technology
Acceso en línea:	https://www.intechopen.com/chapters/72274
Etiquetas:	Agregar Etiqueta Sin Etiquetas, Sea el primero en etiquetar este registro!