Optimization of MEMS Actuator Driven by Shape Memory Alloy Thin Film Phase Change
At the microscale, shape memory alloy (SMA) microelectromechanical system (MEMS) bimorph actuators offer great potential based on their inherently high work density. An optimization problem relating to the deflection and curvature based on shape memory MEMS bimorph was identified, formulated, and so...
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| Formato: | Capítulo de libro |
| Lenguaje: | inglés |
| Publicado: |
IntechOpen
2020
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| Materias: | |
| Acceso en línea: | https://www.intechopen.com/chapters/72274 |
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