MEMS Humidity Sensors
This chapter reviews MEMS humidity sensors fabricated using microfabrication technologies. It discusses the operation principle, different designs, and the fabrication technologies for the different sensing mechanisms. Sensing humidity using capacitive sensors is first reviewed with a highlight on t...
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| Main Authors: | , , |
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| Format: | Book Chapter |
| Language: | English |
| Published: |
IntechOpen
2021
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| Subjects: | |
| Online Access: | https://www.intechopen.com/chapters/77296 |
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