Advancement in Micromachining Techniques of MEMS Piezoresistive Pressure Sensors to Minimize Offset Drift Due to Humidity and Temperature

The present chapter focuses on the micromachining technology advancement to enhance the silicon micromachined piezoresistive pressure sensor’s output characteristics. The differential pressure sensors with a glass bond or a passivation layer of Cr/Au metals at the device’s rear side are fabricated u...

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Autores principales:	Deepu, Bagur Rudrappa, Pavithra, Belthangady, Nayak, Mangalore Manjunatha, Bhat, Kunchinadka Narayana
Formato:	Capítulo de libro
Lenguaje:	inglés
Publicado:	IntechOpen 2024
Materias:	Physical Sciences, Engineering and Technology
Acceso en línea:	https://www.intechopen.com/chapters/88482
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