Advancement in Micromachining Techniques of MEMS Piezoresistive Pressure Sensors to Minimize Offset Drift Due to Humidity and Temperature
The present chapter focuses on the micromachining technology advancement to enhance the silicon micromachined piezoresistive pressure sensor’s output characteristics. The differential pressure sensors with a glass bond or a passivation layer of Cr/Au metals at the device’s rear side are fabricated u...
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| Autores principales: | , , , |
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| Formato: | Capítulo de libro |
| Lenguaje: | inglés |
| Publicado: |
IntechOpen
2024
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| Materias: | |
| Acceso en línea: | https://www.intechopen.com/chapters/88482 |
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