Depth Profiling of Multilayer Thin Films Using Ion Beam Techniques
Functional properties of thin film structures depend a lot on the thickness and chemical composition of the layer stack. There are many analytical techniques available for the identification and quantification of chemical species of thin film depositions on substrates, down to a few monolayers thick...
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| Formato: | Capítulo de libro |
| Lenguaje: | inglés |
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IntechOpen
2022
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| Materias: | |
| Acceso en línea: | https://www.intechopen.com/chapters/82731 |
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