Depth Profiling of Multilayer Thin Films Using Ion Beam Techniques

Functional properties of thin film structures depend a lot on the thickness and chemical composition of the layer stack. There are many analytical techniques available for the identification and quantification of chemical species of thin film depositions on substrates, down to a few monolayers thick...

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Detalles Bibliográficos

Autor principal:	Msimanga, Mandla
Formato:	Capítulo de libro
Lenguaje:	inglés
Publicado:	IntechOpen 2022
Materias:	Physical Sciences, Engineering and Technology
Acceso en línea:	https://www.intechopen.com/chapters/82731
Etiquetas:	Agregar Etiqueta Sin Etiquetas, Sea el primero en etiquetar este registro!