Manufacturing and Investigating Objective Lens for Ultrahigh Resolution Lithography Facilities

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Bibliographic Details
Main Authors: Chkhalo, N.I., Pestov, A.E., N.N., Salashchenko, Toropov, M.N.
Format: Book Chapter
Language:English
Published: IntechOpen 2010
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Online Access:https://www.intechopen.com/chapters/8663
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