DC Parallel Ribbon Ion Beams for High-Dose Processes
Ribbon beams of heavy ions have advantages over cylindrical beams, including higher space-charge limits. History of use goes from Calutrons, Freeman and Bernas ion sources, to the first ion implanters in the 1970s. In the 1990s, 300 mm uniform parallel mass-analyzed ribbon beams were developed to en...
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| Formato: | Capítulo de libro |
| Lenguaje: | inglés |
| Publicado: |
IntechOpen
2023
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| Materias: | |
| Acceso en línea: | https://www.intechopen.com/chapters/86944 |
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