Impact of Process Variations on the Performance of Wavelength-Dependent Devices
One of the main factors for the rapid growth and industrialization of the integrated photonics field was the previous development by the microelectronics sector of lithography tools and processes for complementary metal oxide semiconductor fabrication, now also employed in the fabrication of photoni...
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| Autores principales: | , , , , , |
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| Formato: | Capítulo de libro |
| Lenguaje: | inglés |
| Publicado: |
IntechOpen
2024
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| Materias: | |
| Acceso en línea: | https://www.intechopen.com/chapters/89298 |
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