Impact of Process Variations on the Performance of Wavelength-Dependent Devices

One of the main factors for the rapid growth and industrialization of the integrated photonics field was the previous development by the microelectronics sector of lithography tools and processes for complementary metal oxide semiconductor fabrication, now also employed in the fabrication of photoni...

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Detalles Bibliográficos

Autores principales:	Venâncio, Inês, Tátá, Joana, Santos, João, Duarte, Paulo, Rodrigues, Carla, Teixeira, António
Formato:	Capítulo de libro
Lenguaje:	inglés
Publicado:	IntechOpen 2024
Materias:	Physical Sciences, Engineering and Technology
Acceso en línea:	https://www.intechopen.com/chapters/89298
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