Annealing Induced Tuning of Microstructure, Morphology, and Optical Characteristics of Ar<sup>+</sup> Sputtered SiC/Si(111) Thin Films
<p id="p1">Silicon carbide (SiC) thin films have gained significant attention due to their exceptional mechanical, electrical, and thermal properties enabling their potential applications in advanced semiconductor devices, high-power electronics, and harsh-environment sensors. In the present work, m...
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| Autores principales: | , |
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| Formato: | Capítulo de libro |
| Lenguaje: | inglés |
| Publicado: |
IntechOpen
2025
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| Materias: | |
| Acceso en línea: | https://www.intechopen.com/chapters/1217699 |
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