Oblique Ar<sup>+</sup> Sputtered SiC Thin Films: Structural, Optical, and Electrical Properties
State-of-the-art experimental facility 200 kV ion accelerator, with energy range of 30–200 kV has been running successfully at Ion Beam Center, KUK. The versatility of this facility lies in providing single charge state and large area irradiation in a single step. In this regard, present work invest...
Saved in:
| Main Authors: | , , , |
|---|---|
| Format: | Book Chapter |
| Language: | English |
| Published: |
IntechOpen
2023
|
| Subjects: | |
| Online Access: | https://www.intechopen.com/chapters/88369 |
| Tags: |
No Tags, Be the first to tag this record!
|