Oblique Ar⁺ Sputtered SiC Thin Films: Structural, Optical, and Electrical Properties

State-of-the-art experimental facility 200 kV ion accelerator, with energy range of 30–200 kV has been running successfully at Ion Beam Center, KUK. The versatility of this facility lies in providing single charge state and large area irradiation in a single step. In this regard, present work invest...

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Autores principales:	Gupta, Divya, Rani, Usha, Singhal, Rahul, Aggarwal, Sanjeev
Formato:	Capítulo de libro
Lenguaje:	inglés
Publicado:	IntechOpen 2023
Materias:	Physical Sciences, Engineering and Technology
Acceso en línea:	https://www.intechopen.com/chapters/88369
Etiquetas:	Agregar Etiqueta Sin Etiquetas, Sea el primero en etiquetar este registro!