Annealing Induced Tuning of Microstructure, Morphology, and Optical Characteristics of Ar⁺ Sputtered SiC/Si(111) Thin Films

<p id="p1">Silicon carbide (SiC) thin films have gained significant attention due to their exceptional mechanical, electrical, and thermal properties enabling their potential applications in advanced semiconductor devices, high-power electronics, and harsh-environment sensors. In the present work, m...

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Autores principales:	Gupta, Divya, Aggarwal, Sanjeev
Formato:	Capítulo de libro
Lenguaje:	inglés
Publicado:	IntechOpen 2025
Materias:	Physical Sciences, Engineering and Technology
Acceso en línea:	https://www.intechopen.com/chapters/1217699
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