MEMS-Based Atomic Force Microscope: Nonlinear Dynamics Analysis and Its Control

In this chapter, we explore a mathematical modelling that describes the nonlinear dynamic behavior of atomic force microscopy (AFM). We propose two control techniques for suppressing the chaotic motion of the system. The proposed model considers the interatomic interactions between the analyzed samp...

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Detalles Bibliográficos

Autores principales:	Ribeiro, Mauricio A., Balthazar, Jose M., Tusset, Ângelo M., Bueno, Átila M., Daum, Hilson H.
Formato:	Capítulo de libro
Lenguaje:	inglés
Publicado:	IntechOpen 2022
Materias:	Physical Sciences, Engineering and Technology
Acceso en línea:	https://www.intechopen.com/chapters/85050
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