MEMS-Based Atomic Force Microscope: Nonlinear Dynamics Analysis and Its Control
In this chapter, we explore a mathematical modelling that describes the nonlinear dynamic behavior of atomic force microscopy (AFM). We propose two control techniques for suppressing the chaotic motion of the system. The proposed model considers the interatomic interactions between the analyzed samp...
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| Autores principales: | , , , , |
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| Formato: | Capítulo de libro |
| Lenguaje: | inglés |
| Publicado: |
IntechOpen
2022
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| Materias: | |
| Acceso en línea: | https://www.intechopen.com/chapters/85050 |
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