MEMS-Based Atomic Force Microscope: Nonlinear Dynamics Analysis and Its Control

In this chapter, we explore a mathematical modelling that describes the nonlinear dynamic behavior of atomic force microscopy (AFM). We propose two control techniques for suppressing the chaotic motion of the system. The proposed model considers the interatomic interactions between the analyzed samp...

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Bibliographic Details

Main Authors:	Ribeiro, Mauricio A., Balthazar, Jose M., Tusset, Ângelo M., Bueno, Átila M., Daum, Hilson H.
Format:	Book Chapter
Language:	English
Published:	IntechOpen 2022
Subjects:	Physical Sciences, Engineering and Technology
Online Access:	https://www.intechopen.com/chapters/85050
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