Perspective Chapter: A Synergistic Strategy for Sub-10 nm IC Manufacturing – From Post-CMP Cleaning with Biomimetic PVA Smart Brushes to Post-EUV Encapsulation with Advanced Polyimide
<p>This research introduces a novel synergistic strategy to fundamentally enhance the manufacturing yield and long-term reliability of sub-10 nm integrated circuits. Our approach deliberately bridges two distinct yet profoundly interconnected critical process nodes surrounding Extreme ultravi...
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| Autores principales: | , , |
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| Formato: | Capítulo de libro |
| Lenguaje: | inglés |
| Publicado: |
IntechOpen
2026
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| Materias: | |
| Acceso en línea: | https://www.intechopen.com/chapters/1237146 |
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