Diffraction Grating Groove Metrology Using AFM & STM
AFM & STM metrology has been around for a long time, and especially intense since it has been awarded by the Nobel Prize in Physics in 1986. Since then, many AFM & STM groove profile measurements on surface relief diffraction gratings have been presented. However, a wide review of the results of the...
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| Autor principal: | |
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| Formato: | Capítulo de libro |
| Lenguaje: | inglés |
| Publicado: |
IntechOpen
2021
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| Materias: | |
| Acceso en línea: | https://www.intechopen.com/chapters/76394 |
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