Digital Control of Active Network Microstructures on Silicon Wafers
This chapter presents a promising digital control of active microstructures developed and tested on silicon chips by current division and thus independent Joule heating powers, especially for planar submillimeter two-dimensional (2-D) grid microstructures built on silicon wafers by surface microfabr...
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| Autores principales: | , , |
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| Formato: | Capítulo de libro |
| Lenguaje: | inglés |
| Publicado: |
IntechOpen
2021
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| Materias: | |
| Acceso en línea: | https://www.intechopen.com/chapters/79521 |
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