Digital Control of Active Network Microstructures on Silicon Wafers

This chapter presents a promising digital control of active microstructures developed and tested on silicon chips by current division and thus independent Joule heating powers, especially for planar submillimeter two-dimensional (2-D) grid microstructures built on silicon wafers by surface microfabr...

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Detalles Bibliográficos

Autores principales:	Ren, Zhongjing, Yuan, Jianping, Yan, Peng
Formato:	Capítulo de libro
Lenguaje:	inglés
Publicado:	IntechOpen 2021
Materias:	Physical Sciences, Engineering and Technology
Acceso en línea:	https://www.intechopen.com/chapters/79521
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