Digital Control of Active Network Microstructures on Silicon Wafers
This chapter presents a promising digital control of active microstructures developed and tested on silicon chips by current division and thus independent Joule heating powers, especially for planar submillimeter two-dimensional (2-D) grid microstructures built on silicon wafers by surface microfabr...
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| Autores principales: | , , |
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| Formato: | Capítulo de libro |
| Lenguaje: | inglés |
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IntechOpen
2021
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| Acceso en línea: | https://www.intechopen.com/chapters/79521 |
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| _version_ | 1879164733370662912 |
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| author | Ren, Zhongjing Yuan, Jianping Yan, Peng |
| author_browse | Ren, Zhongjing Yan, Peng Yuan, Jianping |
| author_facet | Ren, Zhongjing Yuan, Jianping Yan, Peng |
| author_sort | Ren, Zhongjing |
| building | IntechOpen |
| collection | Acceso abierto |
| description | This chapter presents a promising digital control of active microstructures developed and tested on silicon chips by current division and thus independent Joule heating powers, especially for planar submillimeter two-dimensional (2-D) grid microstructures built on silicon wafers by surface microfabrication. Current division on such 2-D grid networks with 2 × 2, 3 × 3, and n × n loops was modeled and analyzed theoretically by employing Kirchhoff’s voltage law (KVL) and Kirchhoff’s current law (KCL), which demonstrated the feasibility of active control of the networks by Joule heating effect. Furthermore, in situ testing of a typical 2-D microstructure with 2 × 2 loops by different DC sources was carried out, and the thermomechanical deformation due to Joule heating was recorded. As a result, active control of the current division has been proven to be a reliable and efficient approach to achieving the digital actuation of 2-D microstructures on silicon chips. Digital control of such microstructural networks on silicon chips envisions great potential applications in active reconfigurable buses for microrobots and flexible electronics. |
| doi_str_mv | 10.5772/intechopen.101486 |
| first_indexed | 2026-10-15T21:39:01Z |
| format | Book Chapter |
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<dc:title>Digital Control of Active Network Microstructures on Silicon Wafers</dc:title>
<dc:creator>Zhongjing Ren</dc:creator>
<dc:creator>Jianping Yuan</dc:creator>
<dc:creator>Peng Yan</dc:creator>
<dc:subject>Physical Sciences, Engineering and Technology</dc:subject>
<dc:description>This chapter presents a promising digital control of active microstructures developed and tested on silicon chips by current division and thus independent Joule heating powers, especially for planar submillimeter two-dimensional (2-D) grid microstructures built on silicon wafers by surface microfabrication. Current division on such 2-D grid networks with 2 × 2, 3 × 3, and n × n loops was modeled and analyzed theoretically by employing Kirchhoff’s voltage law (KVL) and Kirchhoff’s current law (KCL), which demonstrated the feasibility of active control of the networks by Joule heating effect. Furthermore, in situ testing of a typical 2-D microstructure with 2 × 2 loops by different DC sources was carried out, and the thermomechanical deformation due to Joule heating was recorded. As a result, active control of the current division has been proven to be a reliable and efficient approach to achieving the digital actuation of 2-D microstructures on silicon chips. Digital control of such microstructural networks on silicon chips envisions great potential applications in active reconfigurable buses for microrobots and flexible electronics.</dc:description>
<dc:publisher>IntechOpen</dc:publisher>
<dc:date>2021-12-07</dc:date>
<dc:type>Chapter, Part Of Book</dc:type>
<dc:identifier>https://www.intechopen.com/chapters/79521</dc:identifier>
<dc:identifier>doi:10.5772/intechopen.101486</dc:identifier>
<dc:language>en</dc:language>
<dc:relation>ISBN:978-1-83968-148-6</dc:relation>
<dc:rights>https://creativecommons.org/licenses/by/3.0/</dc:rights>
<dc:source>https://www.intechopen.com/books/10269 ; Network-on-Chip - Architecture, Optimization, and Design Explorations</dc:source>
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| id | intech-79521 |
| institution | IntechOpen |
| isbn | 978-1-83968-148-6 |
| language | English |
| last_indexed | 2026-10-15T21:39:01Z |
| publishDate | 2021 |
| publishDateRange | 2021 |
| publishDateSort | 2021 |
| publisher | IntechOpen |
| publisherStr | IntechOpen |
| record_format | oai_dc |
| spelling | intech-795212021-12-07 Digital Control of Active Network Microstructures on Silicon Wafers Zhongjing Ren Jianping Yuan Peng Yan Physical Sciences, Engineering and Technology This chapter presents a promising digital control of active microstructures developed and tested on silicon chips by current division and thus independent Joule heating powers, especially for planar submillimeter two-dimensional (2-D) grid microstructures built on silicon wafers by surface microfabrication. Current division on such 2-D grid networks with 2 × 2, 3 × 3, and n × n loops was modeled and analyzed theoretically by employing Kirchhoff’s voltage law (KVL) and Kirchhoff’s current law (KCL), which demonstrated the feasibility of active control of the networks by Joule heating effect. Furthermore, in situ testing of a typical 2-D microstructure with 2 × 2 loops by different DC sources was carried out, and the thermomechanical deformation due to Joule heating was recorded. As a result, active control of the current division has been proven to be a reliable and efficient approach to achieving the digital actuation of 2-D microstructures on silicon chips. Digital control of such microstructural networks on silicon chips envisions great potential applications in active reconfigurable buses for microrobots and flexible electronics. IntechOpen 2021-12-07 Chapter, Part Of Book https://www.intechopen.com/chapters/79521 doi:10.5772/intechopen.101486 en ISBN:978-1-83968-148-6 https://creativecommons.org/licenses/by/3.0/ https://www.intechopen.com/books/10269 ; Network-on-Chip - Architecture, Optimization, and Design Explorations |
| spellingShingle | Physical Sciences, Engineering and Technology Ren, Zhongjing Yuan, Jianping Yan, Peng Digital Control of Active Network Microstructures on Silicon Wafers |
| title | Digital Control of Active Network Microstructures on Silicon Wafers |
| title_full | Digital Control of Active Network Microstructures on Silicon Wafers |
| title_fullStr | Digital Control of Active Network Microstructures on Silicon Wafers |
| title_full_unstemmed | Digital Control of Active Network Microstructures on Silicon Wafers |
| title_short | Digital Control of Active Network Microstructures on Silicon Wafers |
| title_sort | digital control of active network microstructures on silicon wafers |
| topic | Physical Sciences, Engineering and Technology |
| url | https://www.intechopen.com/chapters/79521 |
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