Sputtering Deposition
Hundreds of research papers on various elements of sputtering have been published. The goal of this chapter is to present different aspects of sputtering that have been observed when materials are exposed to intense ion beams. Sputtering deposition is a common physical vapor deposition technology th...
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| Autores principales: | , |
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| Formato: | Capítulo de libro |
| Lenguaje: | inglés |
| Publicado: |
IntechOpen
2022
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| Materias: | |
| Acceso en línea: | https://www.intechopen.com/chapters/84564 |
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